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Cosmo
Cosmo 14:30, 7 October 2026 0

Russia creates its first 130 nm lithography tool, which lags 25 years behind Western counterparts

Zelenograd Nanotechnology Center (ZNTC) has completed the third stage of R&D on Russia's first lithography tool for 200-mm wafers on a 130nm process. CNews reported the news back in August 2026. The prototype is now...
Russia creates its first 130 nm lithography tool, which lags 25 years behind Western counterparts

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